Electron Microprobe Analysis by Wavelength Dispersive Spectrometry on the JEOL JXA-733 Superprobe

نویسنده

  • Nilanjan Chatterjee
چکیده

The electron microprobe provides a complete micron-scale quantitative chemical analysis of inorganic solids. The method is nondestructive and utilizes characteristic x-rays excited by an electron beam, incident on a flat surface of the sample. This course will provide an introduction to the theory of x-ray microanalysis by wavelength and energy dispersive spectrometry (WDS and EDS), ZAF matrix correction procedures and different imaging techniques including scanning backscattered electron (BE), scanning secondary electron (SE), scanning x-ray (by WDS or EDS, also known as compositional or elemental maps), and scanning cathodoluminescence (CL) imaging. Lab sessions will involve hands-on use of the JEOL JXA-733 Superprobe.

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تاریخ انتشار 2002